In order to fabricate microsensors, a micromachining, microfabrication technique based on LSI technologies has been used. In this paper, useful micromachining techniques are described. Examples of integrated microsensors, such as a pressure sensor including a readout circuit and a multisensor cell for blood gas analysis, are introduced. Microflow control devices, such as a microvalve and a micropump for integrated chemical analysis systems, are also described.
|Number of pages||14|
|Journal||Applied Biochemistry and Biotechnology|
|Publication status||Published - 1993 Apr 1|
- LSI technologies
ASJC Scopus subject areas
- Applied Microbiology and Biotechnology
- Molecular Biology