Magnetic thin film inductors were developed for mobile communication handsets application. A magnetic thin film-covered spiral coil was microfabricated on high resistivity silicon wafer substrate. Large spacing between the spiral coil and silicon wafer was obtained to reduce eddy current losses in the substrate. The material development, complete microfabrication and finite element simulation of the inductors are further explored.
ASJC Scopus subject areas
- Physics and Astronomy(all)