Microfabrication and characteristics of magnetic thin-film inductors in the ultrahigh frequency region

M. Yamaguchi, K. Suezawa, K. I. Arai, Y. Takahashi, S. Kikuchi, Y. Shimada, W. D. Li, S. Tanabe, K. Ito

Research output: Contribution to journalArticlepeer-review

143 Citations (Scopus)

Abstract

Magnetic thin film inductors were developed for mobile communication handsets application. A magnetic thin film-covered spiral coil was microfabricated on high resistivity silicon wafer substrate. Large spacing between the spiral coil and silicon wafer was obtained to reduce eddy current losses in the substrate. The material development, complete microfabrication and finite element simulation of the inductors are further explored.

Original languageEnglish
Pages (from-to)7919-7922
Number of pages4
JournalJournal of Applied Physics
Volume85
Issue number11
DOIs
Publication statusPublished - 1999 Jun

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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