Microfabricated vanadium oxide resonant thermal sensor with a high temperature coefficient of resonant frequency

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Abstract

This study describes our newly fabricated resonant thermal sensors based on vanadium oxide and investigates the temperature dependences of their resonant frequencies and Q factor. The deposited vanadium oxide thin films comprise 55% VO2 and 45% V2O5. The resonant frequency of the fabricated vanadium oxide resonators linearly varies with temperature, and the value of temperature coefficient of the resonant frequency is -1308 ppm/K in the range of 20-100°C. The averaged Q factor in this range was 540. The temperature and thermal resolution of the vanadium oxide resonator are estimated as 1.69 mKWHz and 4.3 nW/√Hz, respectively, which are higher than those of a Si resonator having similar dimensions and under similar conditions.

Original languageEnglish
Title of host publicationMEMS 2016 - 29th IEEE International Conference on Micro Electro Mechanical Systems
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1042-1045
Number of pages4
ISBN (Electronic)9781509019731
DOIs
Publication statusPublished - 2016 Feb 26
Event29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016 - Shanghai, China
Duration: 2016 Jan 242016 Jan 28

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume2016-February
ISSN (Print)1084-6999

Other

Other29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016
CountryChina
CityShanghai
Period16/1/2416/1/28

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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  • Cite this

    Inomata, N., Pan, L., Toda, M., & Ono, T. (2016). Microfabricated vanadium oxide resonant thermal sensor with a high temperature coefficient of resonant frequency. In MEMS 2016 - 29th IEEE International Conference on Micro Electro Mechanical Systems (pp. 1042-1045). [7421812] (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2016-February). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2016.7421812