Microfabricated spherical bi-convex quartz crystal microbalance array

Li Li, Takashi Abe, Masayoshi Esashi

Research output: Contribution to journalConference article

2 Citations (Scopus)

Abstract

A miniaturized spherical bi-convex quartz crystal microbalance (QCM) array was fabricated by reactive ion etching (RIE) and photoresist reflow with solvent vapor technology. The spherical convex shape is necessary to suppress a spurious mode and obtain a high Q factor. Not only can the large-radius spherical convex shape be achieved by this technology, but also miniaturization and batch fabrication. The Q factor of the fabricated QCM (80000) is two times higher than that of the planar QCM, and the spurious mode around the fundamental vibration mode is suppressed very well. It also has superior resonant characteristic under the viscoelastic liquid.

Original languageEnglish
Article numberTPa21
Pages (from-to)327-330
Number of pages4
JournalProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Publication statusPublished - 2005 Oct 25
Event18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 Miami - Miami Beach, FL, United States
Duration: 2005 Jan 302005 Feb 3

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

Fingerprint Dive into the research topics of 'Microfabricated spherical bi-convex quartz crystal microbalance array'. Together they form a unique fingerprint.

  • Cite this