Microfabricated scanning near-field probe for sub-terahertz spectroscopy

Kentaro Iwami, Takahito Ono, Masayoshi Esashi

Research output: Contribution to journalConference articlepeer-review


This paper reports design, fabrication and evaluation of a novel scanning near-field probe for terahertz (THz) local time domain spectroscopy (THz-TDS). A microfabricated scanning near-field optical microscopy (SNOM) probe was assembled with a low-temperature-grown gallium arsenide (LT-GaAs) photoconductive antenna. The probe structure was evaluated and determined by a finite-difference time-domain (FDTD) numerical simulation. The assembly was used as the THz emitter and local THz source. Another LT-GaAs antenna situated at the opposite side was used as the detector. A THz-TDS measurement using the microfabricated SNOM probe and photoconductive antenna was performed.

Original languageEnglish
Article number713313
JournalProceedings of SPIE - The International Society for Optical Engineering
Publication statusPublished - 2009
Event5th International Symposium on Instrumentation Science and Technology - Shenyang, China
Duration: 2009 Sep 152009 Sep 18


  • Finite-difference time-domain method
  • Gallium arsenide
  • Microelectromechanical systems (MEMS)
  • Scanning near-field optical microscopy
  • Terahertz
  • Terahertz time-domain spectroscopy

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


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