Abstract
A miniaturized finger quartz crystal microbalance (QCM) array was fabricated by smooth surface deep-reactive-ion etching (deep-RIE) technology and transparent quartz glass stencil mask with two-level plane for alignment. The finger-QCM array was designed by reducing the support loss and the fixed part of it was made small compared with conventional inverted-mesa QCM. The Q factor of the finger QCM array is about 16000 for 52.1 MHz with 1 mm-electrode and 22000 for 41.7 MHz with 0.5mm-electrode. The Q factor of the finger-QCM is above 5 and 44 times greater than that of the inverted-mesa QCM at the same frequency and electrode diameter, respectively.
| Original language | English |
|---|---|
| Article number | TPa22 |
| Pages (from-to) | 331-334 |
| Number of pages | 4 |
| Journal | Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) |
| Publication status | Published - 2005 Oct 25 |
| Event | 18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 Miami - Miami Beach, FL, United States Duration: 2005 Jan 30 → 2005 Feb 3 |
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Mechanical Engineering
- Electrical and Electronic Engineering
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Cite this
Li, L., Abe, T., & Esashi, M. (2005). Microfabricated finger-QCM array for ultrahigh sensitive gravimetry. Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 331-334. [TPa22].