Microfabricated finger-QCM array for ultrahigh sensitive gravimetry

Li Li, Takashi Abe, Masayoshi Esashi

Research output: Contribution to journalConference article

Abstract

A miniaturized finger quartz crystal microbalance (QCM) array was fabricated by smooth surface deep-reactive-ion etching (deep-RIE) technology and transparent quartz glass stencil mask with two-level plane for alignment. The finger-QCM array was designed by reducing the support loss and the fixed part of it was made small compared with conventional inverted-mesa QCM. The Q factor of the finger QCM array is about 16000 for 52.1 MHz with 1 mm-electrode and 22000 for 41.7 MHz with 0.5mm-electrode. The Q factor of the finger-QCM is above 5 and 44 times greater than that of the inverted-mesa QCM at the same frequency and electrode diameter, respectively.

Original languageEnglish
Article numberTPa22
Pages (from-to)331-334
Number of pages4
JournalProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Publication statusPublished - 2005 Oct 25
Event18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 Miami - Miami Beach, FL, United States
Duration: 2005 Jan 302005 Feb 3

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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