Microfabricated electrostatic planar lens array and extractors for multi-focused ion beam system using ionic liquid ion source emitter array

Ryo Yoshida, Motoaki Hara, Hiroyuki Oguchi, Hiroki Kuwano

Research output: Contribution to journalConference article

1 Citation (Scopus)

Abstract

This paper describes development of the electrostatic planar extractors and lenses integrated with the ionic liquid ion source (ILIS) array to realize multi focused ion beam system. The extractors and the lenses reduced ion beam divergence angle from 11° to 7.9°. Also, switching control of ion beam was demonstrated by operating separated extractors. Finally we performed Si substrate etching using various kinds of ionic liquid. As a result, 3.3 times larger sputtering yield of 7.3 atom/ion at 83% lower acceleration voltage than those of conventional Ga+ focused ion beam (FIB) was achieved.

Original languageEnglish
Article number7050894
Pages (from-to)93-96
Number of pages4
JournalProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume2015-February
Issue numberFebruary
DOIs
Publication statusPublished - 2015 Feb 26
Event2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015 - Estoril, Portugal
Duration: 2015 Jan 182015 Jan 22

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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