Microdefocusing Method for Measuring Acoustic Properties Using Acoustic Microscope

Hiroshi Kanai, Noriyoshi Chubachi, Toshio Sannomiya

Research output: Contribution to journalArticle

3 Citations (Scopus)

Abstract

Many papers have been reporting on measurement of acoustic properties of materials by acoustic microscopy. In a conventional method of V(c) curve analysis, the phase velocity and the propagation attenuation of a leaky surface acoustic wave (LSAW) are determined from the interference period Ac and the slope of the V(c) curve, respectively. For this method it is necessary to measure the V (c) curve for a period several times as long as the interference period Ac. Therefore, it is difficult to measure the acoustic properties of a sample with high resolution by the method. In order to overcome these problems, a new method called the microdefocusing method is proposed, to determine the acoustic properties of a sample by analyzing V(c) values measured in the microdefocusing region within an interference period Ac near a focal plane. A new-type of ultrasonic transducer called the butterfly transducer is proposed to be applied to this microdefocusing method and a digital signal processing procedure is developed to analyze the output of the ultrasonic transducer. Basic experiments are performed to confirm the principles of the new method.

Original languageEnglish
Pages (from-to)643-652
Number of pages10
JournalIEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
Volume39
Issue number5
DOIs
Publication statusPublished - 1992 Sep

ASJC Scopus subject areas

  • Instrumentation
  • Acoustics and Ultrasonics
  • Electrical and Electronic Engineering

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