Microcrystalline diamond deposition using inert-gas curtain combustion-flame method

Toshimi Abe, Maki Suemitsu, Nobuo Miyamoto

Research output: Contribution to journalArticle

6 Citations (Scopus)

Abstract

Inert-gas curtain combustion-flame method, in which a combustion flame of oxygen/acetylene mixture is surrounded by an inert-gas (Ar and/or He) flow to prevent mixing oxygen from the air, has been developed for the deposition of microcrystalline diamond thin films. The emission spectra from the combustion flame showed reduction in the ultraviolet region with increasing inert-gas flow, indicating a suppression of the outer flame by the curtain. Highly uniform and highly dense microcrystalline films of diamonds were successfully prepared, which is understood to be caused by realization of a combustion flame with optimum radical concentrations. Morphological variations due to the choice of the inert gas have also been found.

Original languageEnglish
Pages (from-to)206-212
Number of pages7
JournalJournal of Crystal Growth
Volume143
Issue number3-4
DOIs
Publication statusPublished - 1994 Oct 2

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Inorganic Chemistry
  • Materials Chemistry

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