Microcolumnar and granular structures of TiO2 films prepared by laser CVD using Nd:YAG laser

Ming Gao, Akihiko Ito, Rong Tu, Takashi Goto

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Citations (Scopus)

Abstract

Microcolumar and granular TiO2 films were prepared by laser chemical vapor deposition using Nd:YAG laser. Effects of deposition temperature on phase and microstructure were investigated. Single-phase rutile TiO 2 films were prepared at 760-936 K, whereas mixtures of rutile and anatase TiO2 films were obtained at 975-1014 K. Single-phase anatase TiO2 films were prepared at 1067 K. Rutile TiO2 films prepared at 899-936 K showed feather-like microcolumnars with a pyramidal cap. Anatase TiO2 films prepared at 1067 K consisted of granular grains. Deposition rates were ranged from 3 to 50 μm h-1.

Original languageEnglish
Title of host publicationMaterials Integration
PublisherTrans Tech Publications Ltd
Pages287-290
Number of pages4
ISBN (Print)9783037853764
DOIs
Publication statusPublished - 2012
EventInt. Symposium of GCOE: Materials Integration, in Conjunction with the 2nd Int. Symposium on Advanced Synthesis and Processing Technology for Materials, ASPT 2011 and the 8th Materials Science School for Young Scientists, KINKEN-WAKATE 2011 - Sendai, Japan
Duration: 2011 Dec 12011 Dec 2

Publication series

NameKey Engineering Materials
Volume508
ISSN (Print)1013-9826
ISSN (Electronic)1662-9795

Other

OtherInt. Symposium of GCOE: Materials Integration, in Conjunction with the 2nd Int. Symposium on Advanced Synthesis and Processing Technology for Materials, ASPT 2011 and the 8th Materials Science School for Young Scientists, KINKEN-WAKATE 2011
CountryJapan
CitySendai
Period11/12/111/12/2

Keywords

  • Granular film
  • Laser CVD
  • Microcolumar

ASJC Scopus subject areas

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering

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