Microcolumnar and granular structures of TiO2 films prepared by laser CVD using Nd:YAG laser

Ming Gao; Akihiko Ito; Rong Tu; Takashi Goto

doi:10.4028/www.scientific.net/KEM.508.287

Microcolumnar and granular structures of TiO₂ films prepared by laser CVD using Nd:YAG laser

Ming Gao, Akihiko Ito, Rong Tu, Takashi Goto

Materials Processing and Characterization Division

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

4 Citations (Scopus)

Abstract

Microcolumar and granular TiO₂ films were prepared by laser chemical vapor deposition using Nd:YAG laser. Effects of deposition temperature on phase and microstructure were investigated. Single-phase rutile TiO ₂ films were prepared at 760-936 K, whereas mixtures of rutile and anatase TiO₂ films were obtained at 975-1014 K. Single-phase anatase TiO₂ films were prepared at 1067 K. Rutile TiO₂ films prepared at 899-936 K showed feather-like microcolumnars with a pyramidal cap. Anatase TiO₂ films prepared at 1067 K consisted of granular grains. Deposition rates were ranged from 3 to 50 μm h^-1.

Original language	English
Title of host publication	Materials Integration
Publisher	Trans Tech Publications Ltd
Pages	287-290
Number of pages	4
ISBN (Print)	9783037853764
DOIs	https://doi.org/10.4028/www.scientific.net/KEM.508.287
Publication status	Published - 2012
Event	Int. Symposium of GCOE: Materials Integration, in Conjunction with the 2nd Int. Symposium on Advanced Synthesis and Processing Technology for Materials, ASPT 2011 and the 8th Materials Science School for Young Scientists, KINKEN-WAKATE 2011 - Sendai, Japan Duration: 2011 Dec 1 → 2011 Dec 2

Publication series

Name	Key Engineering Materials
Volume	508
ISSN (Print)	1013-9826
ISSN (Electronic)	1662-9795

Other

Other	Int. Symposium of GCOE: Materials Integration, in Conjunction with the 2nd Int. Symposium on Advanced Synthesis and Processing Technology for Materials, ASPT 2011 and the 8th Materials Science School for Young Scientists, KINKEN-WAKATE 2011
Country/Territory	Japan
City	Sendai
Period	11/12/1 → 11/12/2

Keywords

Granular film
Laser CVD
Microcolumar

ASJC Scopus subject areas

Materials Science(all)
Mechanics of Materials
Mechanical Engineering

Access to Document

10.4028/www.scientific.net/KEM.508.287

Cite this

Gao, M, Ito, A, Tu, R & Goto, T 2012, Microcolumnar and granular structures of TiO₂ films prepared by laser CVD using Nd:YAG laser. in Materials Integration. Key Engineering Materials, vol. 508, Trans Tech Publications Ltd, pp. 287-290, Int. Symposium of GCOE: Materials Integration, in Conjunction with the 2nd Int. Symposium on Advanced Synthesis and Processing Technology for Materials, ASPT 2011 and the 8th Materials Science School for Young Scientists, KINKEN-WAKATE 2011, Sendai, Japan, 11/12/1. https://doi.org/10.4028/www.scientific.net/KEM.508.287

@inproceedings{499c95039a05422d82eee3bbc63d09e0,

title = "Microcolumnar and granular structures of TiO2 films prepared by laser CVD using Nd:YAG laser",

abstract = "Microcolumar and granular TiO2 films were prepared by laser chemical vapor deposition using Nd:YAG laser. Effects of deposition temperature on phase and microstructure were investigated. Single-phase rutile TiO 2 films were prepared at 760-936 K, whereas mixtures of rutile and anatase TiO2 films were obtained at 975-1014 K. Single-phase anatase TiO2 films were prepared at 1067 K. Rutile TiO2 films prepared at 899-936 K showed feather-like microcolumnars with a pyramidal cap. Anatase TiO2 films prepared at 1067 K consisted of granular grains. Deposition rates were ranged from 3 to 50 μm h-1.",

keywords = "Granular film, Laser CVD, Microcolumar",

author = "Ming Gao and Akihiko Ito and Rong Tu and Takashi Goto",

year = "2012",

doi = "10.4028/www.scientific.net/KEM.508.287",

language = "English",

isbn = "9783037853764",

series = "Key Engineering Materials",

publisher = "Trans Tech Publications Ltd",

pages = "287--290",

booktitle = "Materials Integration",

note = "Int. Symposium of GCOE: Materials Integration, in Conjunction with the 2nd Int. Symposium on Advanced Synthesis and Processing Technology for Materials, ASPT 2011 and the 8th Materials Science School for Young Scientists, KINKEN-WAKATE 2011 ; Conference date: 01-12-2011 Through 02-12-2011",

}

TY - GEN

T1 - Microcolumnar and granular structures of TiO2 films prepared by laser CVD using Nd:YAG laser

AU - Gao, Ming

AU - Ito, Akihiko

AU - Tu, Rong

AU - Goto, Takashi

PY - 2012

Y1 - 2012

N2 - Microcolumar and granular TiO2 films were prepared by laser chemical vapor deposition using Nd:YAG laser. Effects of deposition temperature on phase and microstructure were investigated. Single-phase rutile TiO 2 films were prepared at 760-936 K, whereas mixtures of rutile and anatase TiO2 films were obtained at 975-1014 K. Single-phase anatase TiO2 films were prepared at 1067 K. Rutile TiO2 films prepared at 899-936 K showed feather-like microcolumnars with a pyramidal cap. Anatase TiO2 films prepared at 1067 K consisted of granular grains. Deposition rates were ranged from 3 to 50 μm h-1.

AB - Microcolumar and granular TiO2 films were prepared by laser chemical vapor deposition using Nd:YAG laser. Effects of deposition temperature on phase and microstructure were investigated. Single-phase rutile TiO 2 films were prepared at 760-936 K, whereas mixtures of rutile and anatase TiO2 films were obtained at 975-1014 K. Single-phase anatase TiO2 films were prepared at 1067 K. Rutile TiO2 films prepared at 899-936 K showed feather-like microcolumnars with a pyramidal cap. Anatase TiO2 films prepared at 1067 K consisted of granular grains. Deposition rates were ranged from 3 to 50 μm h-1.

KW - Granular film

KW - Laser CVD

KW - Microcolumar

UR - http://www.scopus.com/inward/record.url?scp=84859731842&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84859731842&partnerID=8YFLogxK

U2 - 10.4028/www.scientific.net/KEM.508.287

DO - 10.4028/www.scientific.net/KEM.508.287

M3 - Conference contribution

AN - SCOPUS:84859731842

SN - 9783037853764

T3 - Key Engineering Materials

SP - 287

EP - 290

BT - Materials Integration

PB - Trans Tech Publications Ltd

T2 - Int. Symposium of GCOE: Materials Integration, in Conjunction with the 2nd Int. Symposium on Advanced Synthesis and Processing Technology for Materials, ASPT 2011 and the 8th Materials Science School for Young Scientists, KINKEN-WAKATE 2011

Y2 - 1 December 2011 through 2 December 2011

ER -