@inproceedings{499c95039a05422d82eee3bbc63d09e0,
title = "Microcolumnar and granular structures of TiO2 films prepared by laser CVD using Nd:YAG laser",
abstract = "Microcolumar and granular TiO2 films were prepared by laser chemical vapor deposition using Nd:YAG laser. Effects of deposition temperature on phase and microstructure were investigated. Single-phase rutile TiO 2 films were prepared at 760-936 K, whereas mixtures of rutile and anatase TiO2 films were obtained at 975-1014 K. Single-phase anatase TiO2 films were prepared at 1067 K. Rutile TiO2 films prepared at 899-936 K showed feather-like microcolumnars with a pyramidal cap. Anatase TiO2 films prepared at 1067 K consisted of granular grains. Deposition rates were ranged from 3 to 50 μm h-1.",
keywords = "Granular film, Laser CVD, Microcolumar",
author = "Ming Gao and Akihiko Ito and Rong Tu and Takashi Goto",
year = "2012",
doi = "10.4028/www.scientific.net/KEM.508.287",
language = "English",
isbn = "9783037853764",
series = "Key Engineering Materials",
publisher = "Trans Tech Publications Ltd",
pages = "287--290",
booktitle = "Materials Integration",
note = "Int. Symposium of GCOE: Materials Integration, in Conjunction with the 2nd Int. Symposium on Advanced Synthesis and Processing Technology for Materials, ASPT 2011 and the 8th Materials Science School for Young Scientists, KINKEN-WAKATE 2011 ; Conference date: 01-12-2011 Through 02-12-2011",
}