@article{1dbd5cb370d846408b3dce86c4aaa2ee,
title = "Microbubble: Fundamental properties and application for semiconductor cleaning",
keywords = "Cleaning, Hydroxyl radicals, Microbubble, Semiconductor, Zeta potential",
author = "Takahashi Masayoshi",
year = "2017",
month = jan,
day = "1",
doi = "10.2493/jjspe.83.636",
language = "English",
volume = "83",
pages = "636--640",
journal = "Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering",
issn = "0912-0289",
publisher = "Japan Society for Precision Engineering",
number = "7",
}