The focusing test of 100 keV x ray with a sputtered-sliced Fresnel zone plate (ss-FZP) was described. Microfocusing was performed using the high brilliant synchrotron radiation from the undulator source with 250-long transport channel. A thick ss-FZP with a thickness of 180 μm was fabricated. Results show that the minimum focal spot size for the first order focal beam was 0.5 μm with a focal distance 900 mm at a photon energy 100 keV.
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