Micro Wishbone interferometer for miniature FTIR spectrometer

Young Min Lee; Masaya Toda; Masayoshi Esashi; Takahito Ono

doi:10.1541/ieejsmas.130.333

Micro Wishbone interferometer for miniature FTIR spectrometer

Young Min Lee, Masaya Toda, Masayoshi Esashi, Takahito Ono

Research output: Contribution to journal › Article › peer-review

4 Citations (Scopus)

Abstract

"Wishbone" type of a Si micro interferometer with a size of 7.5 mm × 7.5 mm is designed and fabricated for applications of the Fourier Transform Infrared (FTIR) spectrometer. The structure of the Si interferometer is fabricated by ICP-RIE etching. Si arms with Au-coated corner cube mirrors at the end can be rotated by integrated rotary comb drive actuators using electrostatic force. Rotational motion of ±4° and the maximum optical path difference of 1920 μm are achieved at an applied voltage of 80 V. With this path length, the resolution of the FT spectroscopy is estimated to be ∼5 cm^-1.

Original language	English
Pages (from-to)	333-334
Number of pages	2
Journal	IEEJ Transactions on Sensors and Micromachines
Volume	130
Issue number	7
DOIs	https://doi.org/10.1541/ieejsmas.130.333
Publication status	Published - 2010

Keywords

FTIR spectrometer
MEMS
Miniature interferometer
Rotary comb drive actuator
Wishbone interferometer

ASJC Scopus subject areas

Mechanical Engineering
Electrical and Electronic Engineering

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T1 - Micro Wishbone interferometer for miniature FTIR spectrometer

AU - Lee, Young Min

AU - Toda, Masaya

AU - Esashi, Masayoshi

AU - Ono, Takahito

PY - 2010

Y1 - 2010

N2 - "Wishbone" type of a Si micro interferometer with a size of 7.5 mm × 7.5 mm is designed and fabricated for applications of the Fourier Transform Infrared (FTIR) spectrometer. The structure of the Si interferometer is fabricated by ICP-RIE etching. Si arms with Au-coated corner cube mirrors at the end can be rotated by integrated rotary comb drive actuators using electrostatic force. Rotational motion of ±4° and the maximum optical path difference of 1920 μm are achieved at an applied voltage of 80 V. With this path length, the resolution of the FT spectroscopy is estimated to be ∼5 cm-1.

AB - "Wishbone" type of a Si micro interferometer with a size of 7.5 mm × 7.5 mm is designed and fabricated for applications of the Fourier Transform Infrared (FTIR) spectrometer. The structure of the Si interferometer is fabricated by ICP-RIE etching. Si arms with Au-coated corner cube mirrors at the end can be rotated by integrated rotary comb drive actuators using electrostatic force. Rotational motion of ±4° and the maximum optical path difference of 1920 μm are achieved at an applied voltage of 80 V. With this path length, the resolution of the FT spectroscopy is estimated to be ∼5 cm-1.

KW - FTIR spectrometer

KW - MEMS

KW - Miniature interferometer

KW - Rotary comb drive actuator

KW - Wishbone interferometer

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JO - IEEJ Transactions on Sensors and Micromachines

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Micro Wishbone interferometer for miniature FTIR spectrometer

Abstract

Keywords

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