Abstract
"Wishbone" type of a Si micro interferometer with a size of 7.5 mm × 7.5 mm is designed and fabricated for applications of the Fourier Transform Infrared (FTIR) spectrometer. The structure of the Si interferometer is fabricated by ICP-RIE etching. Si arms with Au-coated corner cube mirrors at the end can be rotated by integrated rotary comb drive actuators using electrostatic force. Rotational motion of ±4° and the maximum optical path difference of 1920 μm are achieved at an applied voltage of 80 V. With this path length, the resolution of the FT spectroscopy is estimated to be ∼5 cm-1.
Original language | English |
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Pages (from-to) | 333-334 |
Number of pages | 2 |
Journal | IEEJ Transactions on Sensors and Micromachines |
Volume | 130 |
Issue number | 7 |
DOIs | |
Publication status | Published - 2010 |
Keywords
- FTIR spectrometer
- MEMS
- Miniature interferometer
- Rotary comb drive actuator
- Wishbone interferometer
ASJC Scopus subject areas
- Mechanical Engineering
- Electrical and Electronic Engineering