A miniature wishbone-type Si interferometer with electrically actuated rotary comb drive actuators is designed and fabricated to apply a Fourier transform infrared (FTIR) spectrometer. Corner cube mirrors are mounted on the end of the Si interferometer that is formed on a glass substrate. The total size of the interferometer is approximately 8 mm × 8 mm. The corner cube mirrors with sharp edges with a size of approximately 1 × 1 × 0.5 mm3 are fabricated using an indentation technique. The rotation angle of rotary comb drive actuators is approximately 11° with an applied voltage of 180 V. Hereby, the maximum optical path difference of approximately 2640 νm is achieved, which corresponds to the highest resolution of ∼4 cm -1 as a spectrometer.
|Journal||Journal of Micromechanics and Microengineering|
|Publication status||Published - 2011 Jun|
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Mechanics of Materials
- Mechanical Engineering
- Electrical and Electronic Engineering