Micro wishbone interferometer for Fourier transform infrared spectrometry

Young Min Lee, Masaya Toda, Masayoshi Esashi, Takahito Ono

Research output: Contribution to journalArticlepeer-review

9 Citations (Scopus)


A miniature wishbone-type Si interferometer with electrically actuated rotary comb drive actuators is designed and fabricated to apply a Fourier transform infrared (FTIR) spectrometer. Corner cube mirrors are mounted on the end of the Si interferometer that is formed on a glass substrate. The total size of the interferometer is approximately 8 mm × 8 mm. The corner cube mirrors with sharp edges with a size of approximately 1 × 1 × 0.5 mm3 are fabricated using an indentation technique. The rotation angle of rotary comb drive actuators is approximately 11° with an applied voltage of 180 V. Hereby, the maximum optical path difference of approximately 2640 νm is achieved, which corresponds to the highest resolution of ∼4 cm -1 as a spectrometer.

Original languageEnglish
Article number065039
JournalJournal of Micromechanics and Microengineering
Issue number6
Publication statusPublished - 2011 Jun

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Mechanics of Materials
  • Mechanical Engineering
  • Electrical and Electronic Engineering


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