Micro wishbone interferometer for Fourier transform infrared spectrometry

Young Min Lee; Masaya Toda; Masayoshi Esashi; Takahito Ono

doi:10.1088/0960-1317/21/6/065039

Micro wishbone interferometer for Fourier transform infrared spectrometry

Young Min Lee, Masaya Toda, Masayoshi Esashi, Takahito Ono

Research output: Contribution to journal › Article › peer-review

9 Citations (Scopus)

Abstract

A miniature wishbone-type Si interferometer with electrically actuated rotary comb drive actuators is designed and fabricated to apply a Fourier transform infrared (FTIR) spectrometer. Corner cube mirrors are mounted on the end of the Si interferometer that is formed on a glass substrate. The total size of the interferometer is approximately 8 mm × 8 mm. The corner cube mirrors with sharp edges with a size of approximately 1 × 1 × 0.5 mm³ are fabricated using an indentation technique. The rotation angle of rotary comb drive actuators is approximately 11° with an applied voltage of 180 V. Hereby, the maximum optical path difference of approximately 2640 νm is achieved, which corresponds to the highest resolution of ∼4 cm ^-1 as a spectrometer.

Original language	English
Article number	065039
Journal	Journal of Micromechanics and Microengineering
Volume	21
Issue number	6
DOIs	https://doi.org/10.1088/0960-1317/21/6/065039
Publication status	Published - 2011 Jun

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Mechanics of Materials
Mechanical Engineering
Electrical and Electronic Engineering

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10.1088/0960-1317/21/6/065039

Cite this

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abstract = "A miniature wishbone-type Si interferometer with electrically actuated rotary comb drive actuators is designed and fabricated to apply a Fourier transform infrared (FTIR) spectrometer. Corner cube mirrors are mounted on the end of the Si interferometer that is formed on a glass substrate. The total size of the interferometer is approximately 8 mm × 8 mm. The corner cube mirrors with sharp edges with a size of approximately 1 × 1 × 0.5 mm3 are fabricated using an indentation technique. The rotation angle of rotary comb drive actuators is approximately 11° with an applied voltage of 180 V. Hereby, the maximum optical path difference of approximately 2640 νm is achieved, which corresponds to the highest resolution of ∼4 cm -1 as a spectrometer.",

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AB - A miniature wishbone-type Si interferometer with electrically actuated rotary comb drive actuators is designed and fabricated to apply a Fourier transform infrared (FTIR) spectrometer. Corner cube mirrors are mounted on the end of the Si interferometer that is formed on a glass substrate. The total size of the interferometer is approximately 8 mm × 8 mm. The corner cube mirrors with sharp edges with a size of approximately 1 × 1 × 0.5 mm3 are fabricated using an indentation technique. The rotation angle of rotary comb drive actuators is approximately 11° with an applied voltage of 180 V. Hereby, the maximum optical path difference of approximately 2640 νm is achieved, which corresponds to the highest resolution of ∼4 cm -1 as a spectrometer.

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Micro wishbone interferometer for Fourier transform infrared spectrometry

Abstract

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