Micro-turbomachine driving an infrared polarization modulator for Fourier transform infrared spectroscopy

Motoaki Hara, S. Tanaka, Masayoshi Esashi

Research output: Contribution to journalConference articlepeer-review


This paper describes development of a micro-air-turbine-driven polarization modulator (MPM) for double modulation Fourier transform infrared spectroscopy (FT-IR). The MPM has a Au/Cr wire grid polarizer on the backside of a φ 5 mm n-type silicon turbine rotor. The MPM was fabricated using silicon bulk micromachining techniques such as photolithography and deep reactive ion etching (deep RIE). We completed first and second generation MPMs. The second generation MPM has an improved blade shape, a narrower radial bearing gap of 10 μm and a better rotor balance compared to those of the first generation MPM. The first generation MPM rotated at about 10,000 rpm using 0.44 MPa compressed air, and realized IR light modulation frequency of 0.3 kHz.

Original languageEnglish
Pages (from-to)282-285
Number of pages4
JournalProceedings of the IEEE Micro Electro Mechanical Systems (MEMS)
Publication statusPublished - 2001
Event14th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2001) - Interlaken, Switzerland
Duration: 2001 Jan 212001 Jan 25

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Mechanical Engineering
  • Electrical and Electronic Engineering


Dive into the research topics of 'Micro-turbomachine driving an infrared polarization modulator for Fourier transform infrared spectroscopy'. Together they form a unique fingerprint.

Cite this