Micro-translation-table for near-field data storage using inverted-scratch-drive-actuators

Yoshiaki Kanamori, Hiroto Yahagi, Minoru Sasaki, Takahito Ono, Kazuhiro Hane

Research output: Contribution to journalConference articlepeer-review

Abstract

We proposed a micro-translation-table to convey a recording medium to a near-field optical head. The microtranslation- table consisted of inverted scratch-drive-actuators (SDAs) actuated by electrostatic force. The microtranslation- table was fabricated on a silicon substrate with surface micromachining technology. The SDAs were arrayed in the same direction. An object was translated by mounting the object on the inverted SDA array. Each SDA can be operated with the step resolution of 1 nanometer order. Therefore, the SDA array is precise as well as powerful. We observed that a micro object was translated in the designed direction with the fabricated SDAs by applying AC voltage of ±600 V at 100Hz. The size of the SDA plate was 70μm long, 70 μm wide, 1.3μm thick and with the bushing of 1.5 μm high. We proposed a novel mechanism releasing the SDAs from the object by retracting them. Therefore, the X-Y translation is possible by placing the inverted SDAs in four different directions. When the SDA was retracted, the vertical displacement of the SDA plate was measured.

Original languageEnglish
Pages (from-to)35-42
Number of pages8
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume4928
DOIs
Publication statusPublished - 2002 Sep 10
EventMEMS/MOEMS Technologies and Applications 2002 - Shanghai, China
Duration: 2002 Oct 142002 Oct 18

Keywords

  • Micro-translation-table
  • Micromachining
  • Optical storage
  • Scratch drive actuator

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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