Micro-tip assembled metal cantilevers with Bi-directional controllability

H. Kwon, M. Nakada, Y. Hirabavashi, A. Higo, M. Ataka, H. Fujita, H. Toshiyoshi

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    Abstract

    Layered-metal micro cantilever with a micro tip was fabricated and characterized for high-density data storage device. The cantilevers were fabricated by the sequential depositions of chromium, gold, and chromium layers by sputtering with their stress and thickness controlled. The reversed sputtering technique was utilized for fine patterning of the cantilevers and hence for good uniformity of cantilever's elevation height after sacrificial release. A micro protrusion was formed at the end position of the cantilever by the newly developed contact shadow mask process. The fabricated cantilevers were driven in the upward direction by the electro thermal Joule heat, and also in the downward direction by the electrostatic force between cantilever and the silicon substrate. A series of small dots as recorded in a thin film photoresist by using the indentation of the fabricated protrusion, which showed that the cantilevers would be applied to high-density data storage devices.

    Original languageEnglish
    Title of host publicationTechnical Proceedings of the 2008 NSTI Nanotechnology Conference and Trade Show, NSTI-Nanotech, Nanotechnology 2008
    Pages446-449
    Number of pages4
    Publication statusPublished - 2008 Oct 1
    Event2008 NSTI Nanotechnology Conference and Trade Show, NSTI Nanotech 2008 Joint Meeting, Nanotechnology 2008 - Quebec City, QC, United States
    Duration: 2008 Jun 12008 Jun 5

    Publication series

    NameTechnical Proceedings of the 2008 NSTI Nanotechnology Conference and Trade Show, NSTI-Nanotech, Nanotechnology 2008
    Volume3

    Other

    Other2008 NSTI Nanotechnology Conference and Trade Show, NSTI Nanotech 2008 Joint Meeting, Nanotechnology 2008
    CountryUnited States
    CityQuebec City, QC
    Period08/6/108/6/5

    Keywords

    • Bi-directional controllability
    • Data storage
    • Metal cantilever
    • Micro tip
    • Peel off
    • Shadow mask

    ASJC Scopus subject areas

    • Mechanical Engineering

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  • Cite this

    Kwon, H., Nakada, M., Hirabavashi, Y., Higo, A., Ataka, M., Fujita, H., & Toshiyoshi, H. (2008). Micro-tip assembled metal cantilevers with Bi-directional controllability. In Technical Proceedings of the 2008 NSTI Nanotechnology Conference and Trade Show, NSTI-Nanotech, Nanotechnology 2008 (pp. 446-449). (Technical Proceedings of the 2008 NSTI Nanotechnology Conference and Trade Show, NSTI-Nanotech, Nanotechnology 2008; Vol. 3).