Minimally invasive inspections and therapies using catheter and endoscope has been widely performed without large incisions and physical burden on the patient, required smallness and particular shape restrict their functions and preciseness of the tools. Micro sensors and actuators using micro electrical mechanical systems (hereinafter called 'MEMS') fabrication technique have been developed for future of minimally invasive medicine which has multi-functions and high performance. Developed MEMS sensors can be utilized not only for medical devices, but also for bionic humanoid systems. The developing bionic humanoid has any lesion models of human organs, tissues, and blood vessel which have extremely similar characteristics of humans. By assembling the MEMS sensors to the models, this elaborate bionic humanoid can be utilized for a surgery practice, an examination, and an evaluation of new developed medical devices. In this paper, ultra-thin pressure sensor using optical fiber, ultrasonic sensor for forward looking intra vascular ultrasonic (hereinafter called 'FL-IVUS'), and active binding catheter using micro actuator has been developed and reported.