Micro-scaled hydrogen gas sensors with patterned anodic titanium oxide nanotube film

Yasuo Kimura; Shota Kimura; Ryota Kojima; Mitsuo Bitoh; Munemitsu Abe; Michio Niwano

doi:10.1016/j.snb.2012.12.016

Micro-scaled hydrogen gas sensors with patterned anodic titanium oxide nanotube film

Yasuo Kimura, Shota Kimura, Ryota Kojima, Mitsuo Bitoh, Munemitsu Abe, Michio Niwano

Human Information Systems Division

Research output: Contribution to journal › Article › peer-review

17 Citations (Scopus)

Abstract

We have fabricated gas sensors with micro-scale-patterned anodic titanium oxide nanotube films formed by local anodization of titanium wires using a hybrid process between top-down (photolithography) and bottom-up (anodization) processes. We examine the response characteristics of the sensors for hydrogen gas to demonstrate that a few % of hydrogen gas in nitrogen ambient produces currents in the range of mA without special interdigitated electrodes. The sensitivity is remarkably improved by thinning the tube walls. The hybrid process is a suitable method for fabrication of micro-scaled gas sensors, which has useful features such as low power consumption, high reliability and portability.

Original language	English
Pages (from-to)	1156-1160
Number of pages	5
Journal	Sensors and Actuators, B: Chemical
Volume	177
DOIs	https://doi.org/10.1016/j.snb.2012.12.016
Publication status	Published - 2013 Jan 21

Keywords

Anodization
Miniaturization
Self-organization
Titanium oxide nanotube

ASJC Scopus subject areas

Instrumentation
Materials Chemistry
Surfaces, Coatings and Films
Metals and Alloys
Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Electrical and Electronic Engineering

Access to Document

10.1016/j.snb.2012.12.016

Fingerprint Dive into the research topics of 'Micro-scaled hydrogen gas sensors with patterned anodic titanium oxide nanotube film'. Together they form a unique fingerprint.

Cite this

@article{101d8c1fdc22443abafd1328d716e954,

title = "Micro-scaled hydrogen gas sensors with patterned anodic titanium oxide nanotube film",

abstract = "We have fabricated gas sensors with micro-scale-patterned anodic titanium oxide nanotube films formed by local anodization of titanium wires using a hybrid process between top-down (photolithography) and bottom-up (anodization) processes. We examine the response characteristics of the sensors for hydrogen gas to demonstrate that a few % of hydrogen gas in nitrogen ambient produces currents in the range of mA without special interdigitated electrodes. The sensitivity is remarkably improved by thinning the tube walls. The hybrid process is a suitable method for fabrication of micro-scaled gas sensors, which has useful features such as low power consumption, high reliability and portability.",

keywords = "Anodization, Miniaturization, Self-organization, Titanium oxide nanotube",

author = "Yasuo Kimura and Shota Kimura and Ryota Kojima and Mitsuo Bitoh and Munemitsu Abe and Michio Niwano",

year = "2013",

month = jan,

day = "21",

doi = "10.1016/j.snb.2012.12.016",

language = "English",

volume = "177",

pages = "1156--1160",

journal = "Sensors and Actuators, B: Chemical",

issn = "0925-4005",

publisher = "Elsevier",

}

TY - JOUR

T1 - Micro-scaled hydrogen gas sensors with patterned anodic titanium oxide nanotube film

AU - Kimura, Yasuo

AU - Kimura, Shota

AU - Kojima, Ryota

AU - Bitoh, Mitsuo

AU - Abe, Munemitsu

AU - Niwano, Michio

PY - 2013/1/21

Y1 - 2013/1/21

N2 - We have fabricated gas sensors with micro-scale-patterned anodic titanium oxide nanotube films formed by local anodization of titanium wires using a hybrid process between top-down (photolithography) and bottom-up (anodization) processes. We examine the response characteristics of the sensors for hydrogen gas to demonstrate that a few % of hydrogen gas in nitrogen ambient produces currents in the range of mA without special interdigitated electrodes. The sensitivity is remarkably improved by thinning the tube walls. The hybrid process is a suitable method for fabrication of micro-scaled gas sensors, which has useful features such as low power consumption, high reliability and portability.

AB - We have fabricated gas sensors with micro-scale-patterned anodic titanium oxide nanotube films formed by local anodization of titanium wires using a hybrid process between top-down (photolithography) and bottom-up (anodization) processes. We examine the response characteristics of the sensors for hydrogen gas to demonstrate that a few % of hydrogen gas in nitrogen ambient produces currents in the range of mA without special interdigitated electrodes. The sensitivity is remarkably improved by thinning the tube walls. The hybrid process is a suitable method for fabrication of micro-scaled gas sensors, which has useful features such as low power consumption, high reliability and portability.

KW - Anodization

KW - Miniaturization

KW - Self-organization

KW - Titanium oxide nanotube

UR - http://www.scopus.com/inward/record.url?scp=84872316762&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84872316762&partnerID=8YFLogxK

U2 - 10.1016/j.snb.2012.12.016

DO - 10.1016/j.snb.2012.12.016

M3 - Article

AN - SCOPUS:84872316762

VL - 177

SP - 1156

EP - 1160

JO - Sensors and Actuators, B: Chemical

JF - Sensors and Actuators, B: Chemical

SN - 0925-4005

ER -

Micro-scaled hydrogen gas sensors with patterned anodic titanium oxide nanotube film

Abstract

Keywords

ASJC Scopus subject areas

Access to Document

Other files and links

Cite this