Micro proximity electron source for nanoprocessing in atmosphere

Wonje Cho, Takahito Ono, Phan Ngoc Minh, Masayoshi Esashi

Research output: Contribution to journalConference articlepeer-review

2 Citations (Scopus)

Abstract

We have designed and fabricated a miniature proximity electron source, which can be used in atmosphere for future high density data storage or electron beam direct lithography. Carbon nanocoils (CNCs) grown on silicon are adopted as electron emitters because of their excellent field emission properties. Electrons are transmitted from a vacuum-sealed cavity to atmosphere through a thin film called as an electron window. As the membrane of the electron window, an ultrathin silicon film is chosen. The submicron diameter of the window will make narrow exuded electron distribution. We propose the concept and design of the device and report on the result of fabrication and measurements of the emission characteristics of CNCs.

Original languageEnglish
Pages (from-to)875-878
Number of pages4
JournalProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Publication statusPublished - 2005 Oct 25
Event18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 Miami - Miami Beach, FL, United States
Duration: 2005 Jan 302005 Feb 3

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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