Micro-probing system for slit width measurement by using a shear-force detection

So Ito, Kikuchi Hirotaka, Yuan Liu Chen, Yuki Shimizu, Wei Gao

Research output: Contribution to conferencePaper

Abstract

A prototype measurement system by using a micro-probe is introduced for the precision measurement of the slit width. The stylus of the micro-probe is consisted of the thermally-pulled capillary glass tube and precision glass ball with 50 μm in diameter, so that the probe tip can be inserted into the inside of the micro-gap. A shear-force detection micro-probing is employed for the precision measurement of the slit width of the slot die coater. The measurement accuracy of the slit width measurement is investigated.

Original languageEnglish
Publication statusPublished - 2015 Oct 18
Event8th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2015 - Kyoto, Japan
Duration: 2015 Oct 182015 Oct 22

Other

Other8th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2015
CountryJapan
CityKyoto
Period15/10/1815/10/22

Keywords

  • Gap measurement
  • Micro-probing
  • Shear-force detection
  • Slot die coater

ASJC Scopus subject areas

  • Industrial and Manufacturing Engineering

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  • Cite this

    Ito, S., Hirotaka, K., Chen, Y. L., Shimizu, Y., & Gao, W. (2015). Micro-probing system for slit width measurement by using a shear-force detection. Paper presented at 8th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2015, Kyoto, Japan.