Abstract
Lead zirconate titanate (PZT) thin films seeded with barium strontium titanate (BST) nano-crystalline particles were fabricated on a Si wafer with a spin-coating technique. The BST particles synthesized with a sol-gel method were dispersed in an acetylacetone (chelating reagent) modified PZT precursor solution of complex alkoxides for the fabrication. The micro-patterns of the PZT film containing 50 mol % BST particles could be obtained by the direct photo-irradiation to the fabricated films for 40 min without any pre-heating treatments, while the PZT films in the absence of the BST particles required pre-heating treatment at 200°C for 10 s before the photo-irradiation. This suggested that the BST crystallines accelerated decomposition of the chelate compounds and subsequent polycondensation of PZT alkoxides.
| Original language | English |
|---|---|
| Pages (from-to) | 609-613 |
| Number of pages | 5 |
| Journal | JOURNAL of CHEMICAL ENGINEERING of JAPAN |
| Volume | 37 |
| Issue number | 5 |
| DOIs | |
| Publication status | Published - 2004 May 1 |
Keywords
- Barium strontium titanate
- Lead zirconate titanate
- Micro-patterning
- Nano-crystalline particle
- Photo-irradiation
ASJC Scopus subject areas
- Chemistry(all)
- Chemical Engineering(all)