Micro-patterning of lead zirconate titanate thin films seeded with barium strontium titanate nano-crystalline particles by photo-irradiation

Tomokazu Tanase, Akira Watanabe, Yoshio Kobayashi, Mikio Konno, Takao Miwa

Research output: Contribution to journalArticlepeer-review

Abstract

Lead zirconate titanate (PZT) thin films seeded with barium strontium titanate (BST) nano-crystalline particles were fabricated on a Si wafer with a spin-coating technique. The BST particles synthesized with a sol-gel method were dispersed in an acetylacetone (chelating reagent) modified PZT precursor solution of complex alkoxides for the fabrication. The micro-patterns of the PZT film containing 50 mol % BST particles could be obtained by the direct photo-irradiation to the fabricated films for 40 min without any pre-heating treatments, while the PZT films in the absence of the BST particles required pre-heating treatment at 200°C for 10 s before the photo-irradiation. This suggested that the BST crystallines accelerated decomposition of the chelate compounds and subsequent polycondensation of PZT alkoxides.

Original languageEnglish
Pages (from-to)609-613
Number of pages5
JournalJOURNAL of CHEMICAL ENGINEERING of JAPAN
Volume37
Issue number5
DOIs
Publication statusPublished - 2004 May 1

Keywords

  • Barium strontium titanate
  • Lead zirconate titanate
  • Micro-patterning
  • Nano-crystalline particle
  • Photo-irradiation

ASJC Scopus subject areas

  • Chemistry(all)
  • Chemical Engineering(all)

Fingerprint Dive into the research topics of 'Micro-patterning of lead zirconate titanate thin films seeded with barium strontium titanate nano-crystalline particles by photo-irradiation'. Together they form a unique fingerprint.

Cite this