Micro-patterned electret for high power electrostatic motor

T. Genda, S. Tanaka, M. Esashi

Research output: Contribution to journalConference article

12 Citations (Scopus)

Abstract

This paper describes the charging method of a micro-patterned electret for a high power electrostaic motor. By applying contact electrification using mercury to electret charging, charging to 5 μm-wide micro-patterned electret was achieved. But, 0.9 μm-wide edges of the electret is not charged due to discharge at the edges. Using this method, a silicon-dioxide electret with 0.5 μm thickness was charged up to a charge density of about -100 V/μmSiO 2 with fair repeatability.

Original languageEnglish
Pages (from-to)470-473
Number of pages4
JournalProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Publication statusPublished - 2004 Jul 19
Event17th IEEE International Conference on Micro Electro Mechanical Systems (MEMS): Maastricht MEMS 2004 Technical Digest - Maastricht, Netherlands
Duration: 2004 Jan 252004 Jan 29

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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