Micro-mirrors connected in series for loss-mechanism study and low-voltage operation

S. Kotani, H. M. Chu, Takashi Sasaki, Kazuhiro Hane

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Micro mirrors connected in series are fabricated and studied for investigating loss mechanism of rotation hinge. Three identical mirrors (center-mirror and side-mirrors) are connected by torsion bars but the torsion bars of the center-mirror are not connected to supporting points of substrate. The other sides of torsion bars of the side-mirrors are fixed to the supporting points of substrate. Since the motions of the series-mirrors are identical to a single mirror in a specific rotational mode, the loss by the supporting points is estimated by comparing their Q factors in vacuum. The Q factor of the series-mirrors is higher by about two orders than that of the single mirror. The energy loss by the supporting points is estimated. The operation voltage of the comb-drive mirror under the resonant condition in vacuum can be decreased by suppressing the loss by the supporting points although the air friction loss is dominant.

Original languageEnglish
Title of host publication2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
Pages554-557
Number of pages4
DOIs
Publication statusPublished - 2011 Sep 1
Event2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 - Beijing, China
Duration: 2011 Jun 52011 Jun 9

Publication series

Name2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

Other

Other2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
CountryChina
CityBeijing
Period11/6/511/6/9

Keywords

  • Micro-mirror
  • energy loss
  • mechanical coupling

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering

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