Abstract
The micromirror is the key component for many optical applications. Up to now, a lot of micromirrors and related works have been reported. Starting from the historical researches, progresses of micromirrors are surveyed. The technical issues are explained based on optics. The reported micromirrors are classified from viewpoints of actuation methods and mirror motions. This is for clearing what the micromirror can do. Then, some applications and their specifications are described. This is for clearing what is required to the micromirrors. The recent researches are described grouping by the issues for clearing the future direction. The established works and the potential of the micromirrors are described.
| Original language | English |
|---|---|
| Title of host publication | Comprehensive Microsystems |
| Publisher | Elsevier |
| Pages | 1-63 |
| Number of pages | 63 |
| Volume | 3 |
| ISBN (Print) | 9780444521903 |
| DOIs | |
| Publication status | Published - 2007 Jan 1 |
Keywords
- Airy disk
- Bessel function
- Bosch process
- Confocal microscope
- Deep reactive ion etching
- Digital micromirror devices
- Dynamic deformation
- Fraunhofer diffraction
- Galvanometric mirror
- Grating light valve
- Huygen's principle
- Laser display
- Lateral comb-drive actuator
- Littman configuration
- Maskless lithography
- Microstar project
- Mirror matrix tube
- Off-axis illumination
- Optical switch
- Parallel plate-type electrostatic actuator
- Piezoresistive sensor
- Polygon mirror
- Pull-in instability
- Rayleigh criteria
- Residual stress
- Scalloping
- Scratch-drive actuator
ASJC Scopus subject areas
- Engineering(all)
- Chemical Engineering(all)