Micro Machining and Nano Probe

Takahito Ono, Masayoshi Esashi

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)166-169
Number of pages4
JournalSeimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering
Volume69
Issue number2
DOIs
Publication statusPublished - 2003

Keywords

  • carbon nanotubes
  • micro-electro-mechanical system (MEMS)
  • micro-heater
  • microactuator
  • near-field scanning optical microscopy (NSOM)
  • scanning probe microscopy (SPM)

ASJC Scopus subject areas

  • Mechanical Engineering

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