Abstract
Advanced states of art of MEMS (Micro Electro Mechanical Systems) technology have been applied to micro industry equipments. These are electrostatically levitated ring rotor gyroscope and micro energy source for self moving machines like robots, maintenance systems used in narrow spaces, components for multi-column electron beam lithography and multi-probe data storage, micro gas control systems, micro/nano mold, micro contactor and thermal RF relay for LSI testing and nano-instruments which performs high sensitivity and spatial resolution.
| Original language | English |
|---|---|
| Pages (from-to) | 429-438 |
| Number of pages | 10 |
| Journal | JSME International Journal, Series B: Fluids and Thermal Engineering |
| Volume | 47 |
| Issue number | 3 |
| DOIs | |
| Publication status | Published - 2004 Aug |
Keywords
- Energy conversion
- Flow control
- Valve
ASJC Scopus subject areas
- Mechanical Engineering
- Physical and Theoretical Chemistry
- Fluid Flow and Transfer Processes