Micro inductor for flip chip micro power source

E. Sugawara, N. Wakou, Fumihiro Sato, H. Matsuki, M. Yamaguchi, K. Shirakawa, T. Masumoto

Research output: Contribution to journalConference article

1 Citation (Scopus)

Abstract

A new micro inductor with a thickness of 300 μm was developed by using power MEMS and continuous deposition technology. The high-quality, superior dc-biased properties of the low height micro inductors for flip chip micro power sources was also described. The efficiency and dc-biased properties of the inductors and the dispersion of the magnetic flux was investigated and calculated.

Original languageEnglish
JournalDigests of the Intermag Conference
Publication statusPublished - 2003 Oct 1
EventIntermag 2003: International Magnetics Conference - Boston, MA, United States
Duration: 2003 Mar 282003 Apr 3

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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  • Cite this

    Sugawara, E., Wakou, N., Sato, F., Matsuki, H., Yamaguchi, M., Shirakawa, K., & Masumoto, T. (2003). Micro inductor for flip chip micro power source. Digests of the Intermag Conference.