Micro IC probe for LSI testing

Takahiro Ito; Renshi Sawada; Eiji Higurashi

doi:10.1109/memsys.1999.746830

Micro IC probe for LSI testing

Takahiro Ito, Renshi Sawada, Eiji Higurashi

Research output: Contribution to conference › Paper › peer-review

16 Citations (Scopus)

Abstract

A micro IC probe, which is a small elastic electrical contact, has been developed to improve LSI testing and reduce its cost. No larger than 300 μm×80 μm, it is fabricated with a pitch of 100 μm by micromachining techniques. Its contact resistance is less than 0.5 Ω, satisfying the requirements for conventional probes, and its compliance is 2-8 μm to accommodate height differences between LSI pads while maintaining contact with them.

Original language	English
Pages	263-266
Number of pages	4
DOIs	https://doi.org/10.1109/memsys.1999.746830
Publication status	Published - 1999
Externally published	Yes
Event	Proceedings of the 1999 12th IEEE International Conference on Micro Electro Mechanical Systems, MEMS - Orlando, FL, USA Duration: 1999 Jan 17 → 1999 Jan 21

Other

Other	Proceedings of the 1999 12th IEEE International Conference on Micro Electro Mechanical Systems, MEMS
City	Orlando, FL, USA
Period	99/1/17 → 99/1/21

ASJC Scopus subject areas

Control and Systems Engineering
Mechanical Engineering
Electrical and Electronic Engineering

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10.1109/memsys.1999.746830

Cite this

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title = "Micro IC probe for LSI testing",

abstract = "A micro IC probe, which is a small elastic electrical contact, has been developed to improve LSI testing and reduce its cost. No larger than 300 μm×80 μm, it is fabricated with a pitch of 100 μm by micromachining techniques. Its contact resistance is less than 0.5 Ω, satisfying the requirements for conventional probes, and its compliance is 2-8 μm to accommodate height differences between LSI pads while maintaining contact with them.",

author = "Takahiro Ito and Renshi Sawada and Eiji Higurashi",

year = "1999",

doi = "10.1109/memsys.1999.746830",

language = "English",

pages = "263--266",

note = "Proceedings of the 1999 12th IEEE International Conference on Micro Electro Mechanical Systems, MEMS ; Conference date: 17-01-1999 Through 21-01-1999",

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TY - CONF

T1 - Micro IC probe for LSI testing

AU - Ito, Takahiro

AU - Sawada, Renshi

AU - Higurashi, Eiji

PY - 1999

Y1 - 1999

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AB - A micro IC probe, which is a small elastic electrical contact, has been developed to improve LSI testing and reduce its cost. No larger than 300 μm×80 μm, it is fabricated with a pitch of 100 μm by micromachining techniques. Its contact resistance is less than 0.5 Ω, satisfying the requirements for conventional probes, and its compliance is 2-8 μm to accommodate height differences between LSI pads while maintaining contact with them.

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DO - 10.1109/memsys.1999.746830

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T2 - Proceedings of the 1999 12th IEEE International Conference on Micro Electro Mechanical Systems, MEMS

Y2 - 17 January 1999 through 21 January 1999

ER -

Micro IC probe for LSI testing

Abstract

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ASJC Scopus subject areas

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