Micro flow sensor and integrated magnetic oxygen sensor using it

Masayoshi Esashi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

13 Citations (Scopus)

Abstract

A thermal micro mass flow sensor was developed. A micro bridge heater was fabricated by micromachining. The sensor has high sensitivity and quick response because of its small thermal capacity and small thermal time constant. Micro bridge differential heaters were used to detect mass flow in a small flow range. An integrated magnetic oxygen sensor was fabricated using the micro thermal flow sensor. The flow sensor and the micro valve will be applied in integrated gas control systems.

Original languageEnglish
Title of host publicationTransducers '91
PublisherPubl by IEEE
Pages34-37
Number of pages4
ISBN (Print)0879425857
Publication statusPublished - 1991 Dec 1
Event1991 International Conference on Solid-State Sensors and Actuators - San Francisco, CA, USA
Duration: 1991 Jun 241991 Jun 28

Publication series

NameTransducers '91

Other

Other1991 International Conference on Solid-State Sensors and Actuators
CitySan Francisco, CA, USA
Period91/6/2491/6/28

ASJC Scopus subject areas

  • Engineering(all)

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