Micro-energy harvesters integrated with a quatrefoil-shaped proof mass suspended by multiple (K,Na)NbO3 beams

Le Van Minh, Motoaki Hara, Hiroki Kuwano

Research output: Contribution to journalArticle

7 Citations (Scopus)

Abstract

In this study, we developed an energy harvester with a multibeam structure employing a (K,Na)NbO3 (KNN) thin film. The harvester had a quatrefoil-shaped proof mass suspended by four KNN beams and was completely fabricated by micromachining technologies. The harvester was designed to obtain high nonlinearity. As a result, the fractional bandwidth of operable frequency was widened by more than 40% when the acceleration was 15 m/s2. The maximum harvested power of 640nW was obtained at the resonant frequency of 1412 Hz.

Original languageEnglish
Article number07HD08
JournalJapanese journal of applied physics
Volume52
Issue number7 PART 2
DOIs
Publication statusPublished - 2013 Jul 1

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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