TY - JOUR
T1 - Micro-energy harvesters integrated with a quatrefoil-shaped proof mass suspended by multiple (K,Na)NbO3 beams
AU - Van Minh, Le
AU - Hara, Motoaki
AU - Kuwano, Hiroki
PY - 2013/7/1
Y1 - 2013/7/1
N2 - In this study, we developed an energy harvester with a multibeam structure employing a (K,Na)NbO3 (KNN) thin film. The harvester had a quatrefoil-shaped proof mass suspended by four KNN beams and was completely fabricated by micromachining technologies. The harvester was designed to obtain high nonlinearity. As a result, the fractional bandwidth of operable frequency was widened by more than 40% when the acceleration was 15 m/s2. The maximum harvested power of 640nW was obtained at the resonant frequency of 1412 Hz.
AB - In this study, we developed an energy harvester with a multibeam structure employing a (K,Na)NbO3 (KNN) thin film. The harvester had a quatrefoil-shaped proof mass suspended by four KNN beams and was completely fabricated by micromachining technologies. The harvester was designed to obtain high nonlinearity. As a result, the fractional bandwidth of operable frequency was widened by more than 40% when the acceleration was 15 m/s2. The maximum harvested power of 640nW was obtained at the resonant frequency of 1412 Hz.
UR - http://www.scopus.com/inward/record.url?scp=84881005095&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84881005095&partnerID=8YFLogxK
U2 - 10.7567/JJAP.52.07HD08
DO - 10.7567/JJAP.52.07HD08
M3 - Article
AN - SCOPUS:84881005095
VL - 52
JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
SN - 0021-4922
IS - 7 PART 2
M1 - 07HD08
ER -