In this study, we developed an energy harvester with a multibeam structure employing a (K,Na)NbO3 (KNN) thin film. The harvester had a quatrefoil-shaped proof mass suspended by four KNN beams and was completely fabricated by micromachining technologies. The harvester was designed to obtain high nonlinearity. As a result, the fractional bandwidth of operable frequency was widened by more than 40% when the acceleration was 15 m/s2. The maximum harvested power of 640nW was obtained at the resonant frequency of 1412 Hz.
ASJC Scopus subject areas
- Physics and Astronomy(all)