Micro-encoder using image obtained by ball lens assembled inside wafer

Minoru Sasaki, Fuki Nakai, Kazuhiro Hane, Kanji Yokomizo, Kazuhito Hori

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

An absolute micro-encoder based on the code imaging is developed. The ball lens (φ300 μm) is assembled inside the cavity between the pyrex glass lid and suspensions in the handling Si layer of the SOI wafer. The photodiode array is prepared in the device Si layer. The image of the scale is incident on the backside of the photodiodes. The electrical wiring to photodiodes does not disturb the optics. The current signal shows the sufficient contrast for resolving the maximum length code having the minimum line width of 13.6 μm.

Original languageEnglish
Title of host publicationIEEE/LEOS Optical MEMS 2005
Subtitle of host publicationInternational Conference on Optical MEMS and Their Applications
Pages125-126
Number of pages2
DOIs
Publication statusPublished - 2005 Dec 1
EventIEEE/LEOS Optical MEMS 2005: International Conference on Optical MEMS and Their Applications - Oulu, Finland
Duration: 2005 Aug 12005 Aug 4

Other

OtherIEEE/LEOS Optical MEMS 2005: International Conference on Optical MEMS and Their Applications
CountryFinland
CityOulu
Period05/8/105/8/4

Keywords

  • Ball lens
  • Code imaging
  • Maximum length code
  • Micro-encoder

ASJC Scopus subject areas

  • Engineering(all)

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