Micro-assembly of electrostatically driven scanning force microscopy probe using clip mechanism

Yusuke Kawai, Chuan Yu Shao, Kyosuke Kotani, Takahito Ono

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)

Abstract

A micro-assembly technique for microstructures using a silicon clip mechanism is developed for a time-of-flight scanning force microscope (TOF-SFM) probe with an electrostatically driven actuator. Microsprings formed by deep reactive-ion etching are used for the clip micromechanism. Cantilever-shaped microelements for the TOF-SFM are handled by a manipulator, and the microgap between the microspring and opposite wall is expanded by pulling the microspring using a microneedle. Then, the microelement is inserted into the micromechanism, and is clipped by releasing the microspring. After assembly, all microelements are fixed with a conductive glue. Electrostatic actuation of the cantilevered microelement is demonstrated. This technique is advantageous in the fabrication of complex three-dimensional microstructures.

Original languageEnglish
Pages (from-to)98-102
Number of pages5
JournalIEEJ Transactions on Sensors and Micromachines
Volume135
Issue number3
DOIs
Publication statusPublished - 2015 Mar 1

Keywords

  • Electrostatic actuator
  • Micro-assembly
  • Micromechanism
  • Scanning force microscopy

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Mechanical Engineering

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