Micro assembly by high rate CVD using CW UV laser

Masahisa Sugihara; Kazuyuki Minami; Masayoshi Esashi

Micro assembly by high rate CVD using CW UV laser

Masahisa Sugihara, Kazuyuki Minami, Masayoshi Esashi

Micro System Integration Center (μSIC)

Research output: Contribution to conference › Paper › peer-review

3 Citations (Scopus)

Abstract

We have developed micro assembly technique which uses polymer as adhesive, deposited by laser assisted CVD. The laser deposition system adopted following techniques to increase deposition rate. Continuous wave (CW) ultraviolet (UV) laser was used. The substrate was cooled to condense the source gas (vinyl acetate) on the surface. The maximum deposition rate by the laser deposition system was about 10 μm/min. The deposited polymer was used to bond a SMA coil actuator to a Si-glass structure for active catheter.

Original language	English
Pages	170-173
Number of pages	4
Publication status	Published - 1995 Dec 1
Event	Proceedings of the 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX. Part 1 (of 2) - Stockholm, Sweden Duration: 1995 Jun 25 → 1995 Jun 29

Other

Other	Proceedings of the 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX. Part 1 (of 2)
City	Stockholm, Sweden
Period	95/6/25 → 95/6/29

ASJC Scopus subject areas

Engineering(all)

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title = "Micro assembly by high rate CVD using CW UV laser",

abstract = "We have developed micro assembly technique which uses polymer as adhesive, deposited by laser assisted CVD. The laser deposition system adopted following techniques to increase deposition rate. Continuous wave (CW) ultraviolet (UV) laser was used. The substrate was cooled to condense the source gas (vinyl acetate) on the surface. The maximum deposition rate by the laser deposition system was about 10 μm/min. The deposited polymer was used to bond a SMA coil actuator to a Si-glass structure for active catheter.",

author = "Masahisa Sugihara and Kazuyuki Minami and Masayoshi Esashi",

year = "1995",

month = dec,

day = "1",

language = "English",

pages = "170--173",

note = "Proceedings of the 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX. Part 1 (of 2) ; Conference date: 25-06-1995 Through 29-06-1995",

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TY - CONF

T1 - Micro assembly by high rate CVD using CW UV laser

AU - Sugihara, Masahisa

AU - Minami, Kazuyuki

AU - Esashi, Masayoshi

PY - 1995/12/1

Y1 - 1995/12/1

N2 - We have developed micro assembly technique which uses polymer as adhesive, deposited by laser assisted CVD. The laser deposition system adopted following techniques to increase deposition rate. Continuous wave (CW) ultraviolet (UV) laser was used. The substrate was cooled to condense the source gas (vinyl acetate) on the surface. The maximum deposition rate by the laser deposition system was about 10 μm/min. The deposited polymer was used to bond a SMA coil actuator to a Si-glass structure for active catheter.

AB - We have developed micro assembly technique which uses polymer as adhesive, deposited by laser assisted CVD. The laser deposition system adopted following techniques to increase deposition rate. Continuous wave (CW) ultraviolet (UV) laser was used. The substrate was cooled to condense the source gas (vinyl acetate) on the surface. The maximum deposition rate by the laser deposition system was about 10 μm/min. The deposited polymer was used to bond a SMA coil actuator to a Si-glass structure for active catheter.

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M3 - Paper

AN - SCOPUS:0029489596

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T2 - Proceedings of the 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX. Part 1 (of 2)

Y2 - 25 June 1995 through 29 June 1995

ER -

Micro assembly by high rate CVD using CW UV laser

Abstract

Other

ASJC Scopus subject areas

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