We have developed micro assembly technique which uses polymer as adhesive, deposited by laser assisted CVD. The laser deposition system adopted following techniques to increase deposition rate. Continuous wave (CW) ultraviolet (UV) laser was used. The substrate was cooled to condense the source gas (vinyl acetate) on the surface. The maximum deposition rate by the laser deposition system was about 10 μm/min. The deposited polymer was used to bond a SMA coil actuator to a Si-glass structure for active catheter.
|Number of pages||4|
|Publication status||Published - 1995 Dec 1|
|Event||Proceedings of the 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX. Part 1 (of 2) - Stockholm, Sweden|
Duration: 1995 Jun 25 → 1995 Jun 29
|Other||Proceedings of the 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX. Part 1 (of 2)|
|Period||95/6/25 → 95/6/29|
ASJC Scopus subject areas