Micro assembly by high rate CVD using CW UV laser

Masahisa Sugihara, Kazuyuki Minami, Masayoshi Esashi

Research output: Contribution to conferencePaperpeer-review

3 Citations (Scopus)

Abstract

We have developed micro assembly technique which uses polymer as adhesive, deposited by laser assisted CVD. The laser deposition system adopted following techniques to increase deposition rate. Continuous wave (CW) ultraviolet (UV) laser was used. The substrate was cooled to condense the source gas (vinyl acetate) on the surface. The maximum deposition rate by the laser deposition system was about 10 μm/min. The deposited polymer was used to bond a SMA coil actuator to a Si-glass structure for active catheter.

Original languageEnglish
Pages170-173
Number of pages4
Publication statusPublished - 1995 Dec 1
EventProceedings of the 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX. Part 1 (of 2) - Stockholm, Sweden
Duration: 1995 Jun 251995 Jun 29

Other

OtherProceedings of the 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX. Part 1 (of 2)
CityStockholm, Sweden
Period95/6/2595/6/29

ASJC Scopus subject areas

  • Engineering(all)

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