Micro and nano measurement instruments

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper presents micro and nano measurement instruments for ultra-precision machining. Optical sensors for measurement of angle and displacement are first described. Technologies for improvement of the sensor sensitivity and bandwidth, reduction of the sensor size as well as development of new multi-axis sensing methods are presented. The second half of the paper presents a number of scanningtype instruments for surface profile measurement. Technologies for reduction of scanning errors, automatic alignment of measuring positions, fast scanning mechanisms are addressed.

Original languageEnglish
Title of host publicationProceedings of the 10th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2010
EditorsP. Shore, Theresa Burke, Henny Spaan, H. Van Brussel
Publishereuspen
Pages235-238
Number of pages4
ISBN (Electronic)9780955308284
Publication statusPublished - 2010 Jan 1
Event10th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2010 - Delft, Netherlands
Duration: 2010 May 312010 Jun 4

Publication series

NameProceedings of the 10th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2010
Volume2

Other

Other10th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2010
CountryNetherlands
CityDelft
Period10/5/3110/6/4

ASJC Scopus subject areas

  • Industrial and Manufacturing Engineering
  • Materials Science(all)
  • Environmental Engineering
  • Mechanical Engineering
  • Instrumentation

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