Inner wall surface coating has been performed in Ar/O2 microplasma produced by radio frequency (RF) impulse discharge using a Mg rod electrode in a narrow glass tube. We found formation of MgO microparticles, together with a relatively flat film consisting of MgO between these microparticles. The MgO film containing MgO microparticles was regarded as an efficient secondary electron emission surface for a low-voltage discharge. Effects of oxygen on the formation of MgO microparticles were investigated under different conditions of Ar/O2 mixing ratio. It was found that the MgO microparticles were produced even in the case of a low oxygen mixing ratio.
ASJC Scopus subject areas
- Physics and Astronomy(all)