MgO microparticle deposition by radio frequency impulse discharge in a small-diameter tube

Takumasa Muraoka, Satoru Iizuka

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

Inner wall surface coating has been performed in Ar/O2 microplasma produced by radio frequency (RF) impulse discharge using a Mg rod electrode in a narrow glass tube. We found formation of MgO microparticles, together with a relatively flat film consisting of MgO between these microparticles. The MgO film containing MgO microparticles was regarded as an efficient secondary electron emission surface for a low-voltage discharge. Effects of oxygen on the formation of MgO microparticles were investigated under different conditions of Ar/O2 mixing ratio. It was found that the MgO microparticles were produced even in the case of a low oxygen mixing ratio.

Original languageEnglish
Article number025501
JournalJapanese journal of applied physics
Volume48
Issue number2
DOIs
Publication statusPublished - 2009 Feb 1

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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