Methods of isfet fabrication

Tadayuki Matsuo, Masayosi Esashi

Research output: Contribution to journal › Article › peer-review

299 Citations (Scopus)

ASJC Scopus subject areas

@article{f62df88cc799488f96a588492e8d656e,

title = "Methods of isfet fabrication",

author = "Tadayuki Matsuo and Masayosi Esashi",

year = "1981",

doi = "10.1016/0250-6874(81)80006-6",

language = "English",

volume = "1",

pages = "77--96",

journal = "Sensors and Actuators",

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AU - Matsuo, Tadayuki

AU - Esashi, Masayosi

PY - 1981

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EP - 96

JO - Sensors and Actuators

JF - Sensors and Actuators

SN - 0250-6874

IS - C

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