Methods of isfet fabrication

Tadayuki Matsuo; Masayosi Esashi

doi:10.1016/0250-6874(81)80006-6

Methods of isfet fabrication

Tadayuki Matsuo, Masayosi Esashi

Micro System Integration Center (μSIC)

Research output: Contribution to journal › Article › peer-review

316 Citations (Scopus)

Original language	English
Pages (from-to)	77-96
Number of pages	20
Journal	Sensors and Actuators
Volume	1
Issue number	C
DOIs	https://doi.org/10.1016/0250-6874(81)80006-6
Publication status	Published - 1981

ASJC Scopus subject areas

Engineering(all)

Access to Document

10.1016/0250-6874(81)80006-6

Cite this

@article{f62df88cc799488f96a588492e8d656e,

title = "Methods of isfet fabrication",

author = "Tadayuki Matsuo and Masayosi Esashi",

year = "1981",

doi = "10.1016/0250-6874(81)80006-6",

language = "English",

volume = "1",

pages = "77--96",

journal = "Sensors and Actuators",

issn = "0250-6874",

publisher = "Elsevier BV",

number = "C",

}

TY - JOUR

T1 - Methods of isfet fabrication

AU - Matsuo, Tadayuki

AU - Esashi, Masayosi

PY - 1981

Y1 - 1981

UR - http://www.scopus.com/inward/record.url?scp=0002245828&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0002245828&partnerID=8YFLogxK

U2 - 10.1016/0250-6874(81)80006-6

DO - 10.1016/0250-6874(81)80006-6

M3 - Article

AN - SCOPUS:0002245828

VL - 1

SP - 77

EP - 96

JO - Sensors and Actuators

JF - Sensors and Actuators

SN - 0250-6874

IS - C

ER -

Methods of isfet fabrication

ASJC Scopus subject areas

Access to Document

Other files and links

Cite this