Method to evaluate the influence of etching damage on microcantilever surface on its mechanical properties

Shinji Ueki, Yuki Nishimori, Hiroshi Imamoto, Tomohiro Kubota, Masakazu Sugiyama, Hideki Kawakatsu, Seiji Samukawa, Gen Hashiguchi

Research output: Contribution to journalArticlepeer-review

6 Citations (Scopus)

Fingerprint Dive into the research topics of 'Method to evaluate the influence of etching damage on microcantilever surface on its mechanical properties'. Together they form a unique fingerprint.

Physics & Astronomy

Engineering & Materials Science