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Method to evaluate the influence of etching damage on microcantilever surface on its mechanical properties
Shinji Ueki, Yuki Nishimori, Hiroshi Imamoto, Tomohiro Kubota, Masakazu Sugiyama, Hideki Kawakatsu, Seiji Samukawa, Gen Hashiguchi
Research output: Contribution to journal › Article › peer-review
6
Citations
(Scopus)