A method for obtaining a depth profile of polarity inverted structure in a layered ferroelectric and/or piezoelectric thin film is proposed. It is performed by surface measurement non-destructively using scanning nonlinear dielectric microscopy. We describe estimation principle for the depth profile with some calculation results of measurement signal, which is related to tip radius of the measurement probe and depth of the inverted layer. Also, experimental results in zinc oxide films which have layered polarity-inverted structure fabricated by radio frequency magnetron sputtering and the estimation of the polarity state on the films are shown.
- Scanning nonlinear dielectric microscopy
- non-destructive measurement
- polarity inverted structure
- polarity measurement
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics