Metallic glass micro-mirror integrated with PZT actuation for low resonant frequency and large exciting angle

Y. C. Tsai, J. W. Lee, T. Naono, Y. C. Lin, M. Esashi, T. Fujii, T. Gessner

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

This paper describes the design, fabrication and characterization of metallic glass micro-mirror integrated with lead zirconate titanate (PZT) actuation for low resonant frequency and large exciting angle. The excellent piezoelectric property of PZT was used to lower the operating voltage. The superior mechanical property of metallic glass resulted from its amorphous structure was used as torsion bar material for improving the performances of the micro-mirror. Two kinds of functional material, PZT and metallic glass, were employed and integrated successfully by compatible Micro Electro Mechanical Systems (MEMS) fabrication processes. The fabricated micro-mirror was excited by PZT actuation beams at resonant frequency. The finite element method was used to simulate and estimate the natural frequency and exciting mode of the micro-mirror structure. The measured resonant frequency of the fabricated micro-mirror is approximately between 55Hz to 57Hz. The largest optical scanning angle 144°was achieved at 55.6Hz resonant frequency and 5Vpp.

Original languageEnglish
Title of host publication2013 Transducers and Eurosensors XXVII
Subtitle of host publicationThe 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013
Pages2493-2496
Number of pages4
DOIs
Publication statusPublished - 2013 Dec 1
Event2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013 - Barcelona, Spain
Duration: 2013 Jun 162013 Jun 20

Publication series

Name2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013

Other

Other2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013
CountrySpain
CityBarcelona
Period13/6/1613/6/20

Keywords

  • Amorphous Structure and Resonant
  • MEMS
  • Metallic Glass
  • Micro-Mirror
  • PZT

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering

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    Tsai, Y. C., Lee, J. W., Naono, T., Lin, Y. C., Esashi, M., Fujii, T., & Gessner, T. (2013). Metallic glass micro-mirror integrated with PZT actuation for low resonant frequency and large exciting angle. In 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013 (pp. 2493-2496). [6627312] (2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013). https://doi.org/10.1109/Transducers.2013.6627312