Metal-containing diamond-like nanocomposite thin film for advanced temperature sensors

T. Takeno, T. Takagi, A. Bozhko, M. Shupegin, T. Sato

Research output: Contribution to journalConference articlepeer-review

11 Citations (Scopus)

Abstract

The conductivity of metal-carbon-silicon nanocomposite films considered as potential candidates for the application as wide-range temperature sensors for severe environmental conditions is studied. The films combine unique properties of amorphous carbons with a new functionality imparted by the presence of metal nanoclusters in host matrix. The deposition of carbon-silicon phase was performed using PECVD of siloxane vapors. Metals (W, Nb, and Cr) with concentration in the range from 12 to 40 at. % were incorporated in the carbon-silicon host matrix by DC magnetron co-sputtering. The conductivity of the films decreases with temperature in the range 80-400 K, being well described by the power-law dependence. The conductivity mechanism found satisfactory explanation in the framework of the model of inelastic tunneling of electrons between metal nanoclusters dispersed in carbon-silicon matrix. The parallel study of the influence of metal concentration increase on carbon phase microstructure was carried out using Raman spectroscopy.

Original languageEnglish
Pages (from-to)2079-2082
Number of pages4
JournalMaterials Science Forum
Volume475-479
Issue numberIII
DOIs
Publication statusPublished - 2005
EventPRICM 5: The Fifth Pacific Rim International Conference on Advanced Materials and Processing - Beijing, China
Duration: 2004 Nov 22004 Nov 5

Keywords

  • Diamond-like
  • Metal
  • Nanocomposite
  • Temperature sensors

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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