Mesoscopic roughness characterization of grown surfaces by atomic force microscopy

Tatsuo Yoshinobu, Atsushi Iwamoto, Hiroshi Iwasaki

Research output: Contribution to journalArticle

29 Citations (Scopus)

Abstract

Mesoscopic roughness of material surfaces grown on (or dissolved from) flat substrates is described in terms of its scale dependence. It is demonstrated that three parameters, including the characteristic correlation length and the anisotropy exponent of scaling, in addition to the scale independent rms roughness on long length scales, describe well the scaling behavior of roughness. A procedure to derive these parameters from atomic force microscopy data is also discussed.

Original languageEnglish
Pages (from-to)L67-L69
JournalJapanese journal of applied physics
Volume33
Issue number1A
DOIs
Publication statusPublished - 1994 Jan
Externally publishedYes

Keywords

  • AFM
  • Atomic force microscopy
  • Dissolution
  • Fractal
  • Growth
  • Metrology
  • Roughness
  • Self-affine
  • Surface

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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