Mercury-sensitized photo-induced chemical vapor deposition of YBa2Cu3Ox films

Hideaki Zama, Shunri Oda, Takayuki Miyake, Takeo Hattori

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)


Low-temperature growth of YBaCuO films by photo-induced chemical vapor deposition using β-diketonate complex and N2O is described. The mercury-sensitization technique is employed. Cu-oxide films are deposited at a substrate temperature Tsub=120°C. Highly oriented Cu2O films are obtained on MgO substrate. YBaCuO films are deposited at Tsub=215°C. The film composition as analysed by energy-dispersive X-ray spectrometry is nearly 1:2:3 (= Y:Ba:Cu). The structure of the YBa2Cu3Ox film is the amorphous phase.

Original languageEnglish
Pages (from-to)151-153
Number of pages3
JournalPhysica C: Superconductivity and its applications
Issue number1-2
Publication statusPublished - 1991 Dec 2
Externally publishedYes

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Energy Engineering and Power Technology
  • Electrical and Electronic Engineering


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