Low-temperature growth of YBaCuO films by photo-induced chemical vapor deposition using β-diketonate complex and N2O is described. The mercury-sensitization technique is employed. Cu-oxide films are deposited at a substrate temperature Tsub=120°C. Highly oriented Cu2O films are obtained on MgO substrate. YBaCuO films are deposited at Tsub=215°C. The film composition as analysed by energy-dispersive X-ray spectrometry is nearly 1:2:3 (= Y:Ba:Cu). The structure of the YBa2Cu3Ox film is the amorphous phase.
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Energy Engineering and Power Technology
- Electrical and Electronic Engineering