MEMS tunable optical filter using auto-cloned photonic crystal

S. Nagasawa, T. Onuki, Y. Ohtera, Hiroki Kuwano

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Abstract

This paper proposes a novel MEMS tunable optical filter (TOP) using an auto-cloned photonic crystal (PhC). The auto-cloning method has great gains to fabricate multi-dimensional PhCs in productivity, flexibility and robustness. A two-dimensional PhC was fabricated by stacking Mb2O5 and SiO2 layers alternately keeping nano-scale periodic corrugations (190nm in pitch) formed on a substrate. This PhC was designed for splitting an incident light into the TM and TE modes at 500nm. Photonic band-gaps were changed by rotating the PhC and the transmittance of the TE mode was changed drastically at 420nm. The PhC was attached on the MEMS device (Eco Scan: Japan Signal) to control its angle of incidence. A resonance frequency of the MEMS structure was 183Hz and that rotation angle reached up to 40 degree. Switching characteristics of our MEMS-TOF were confirmed and its availability was demonstrated.

Original languageEnglish
Title of host publication19th IEEE International Conference on Micro Electro Mechanical Systems
Pages858-861
Number of pages4
Volume2006
Publication statusPublished - 2006 Oct 24
Event19th IEEE International Conference on Micro Electro Mechanical Systems - Istanbul, Turkey
Duration: 2006 Jan 222006 Jan 26

Other

Other19th IEEE International Conference on Micro Electro Mechanical Systems
CountryTurkey
CityIstanbul
Period06/1/2206/1/26

ASJC Scopus subject areas

  • Mechanical Engineering
  • Electrical and Electronic Engineering
  • Control and Systems Engineering

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