MEMS technology: Optical application, medical application and SOC application

Masayoshi Esashi

Research output: Contribution to conferencePaperpeer-review

4 Citations (Scopus)

Abstract

MEMS (Micro ElectroMechanical Systems) have been developed based on a silicon bulk micromachining. Wafer process packaging was applied to electrostatically levitated rotational gyroscope and micro relay. High density electrical feedthrough made by glass deep RIE and metal electroplating enabled array MEMS as multiprobe data storage and contactor for LSI probing. Fine diameter fiber optic sensors for pressure and SNOM were developed. Hydrogen storage capacity of carbon nanotube was measured using resonant frequency shift of thin silicon cantilever.

Original languageEnglish
Pages6-11
Number of pages6
Publication statusPublished - 2002 Jan 1
Event2002 Symposium on VLSI Technology Digest of Technical Papers - Honolulu, HI, United States
Duration: 2002 Jun 112002 Jun 13

Other

Other2002 Symposium on VLSI Technology Digest of Technical Papers
CountryUnited States
CityHonolulu, HI
Period02/6/1102/6/13

ASJC Scopus subject areas

  • Engineering(all)

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