MEMS research is better together

Kentaro Totsu, Masaaki Moriyama, Masayoshi Esashi

Research output: Contribution to journalComment/debatepeer-review

5 Citations (Scopus)


Open collaboration based on shared facilities can accelerate the commercialization of microelectromechanical systems.

Original languageEnglish
Pages (from-to)134-136
Number of pages3
JournalNature Electronics
Issue number4
Publication statusPublished - 2019 Apr 1

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Electrical and Electronic Engineering


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