MEMS integrated with silicon photonic wire waveguides

Akio Higo; Hiroshi Toshiyoshi; Hiroyuki Fujita; Yoshiaki Nakano

MEMS integrated with silicon photonic wire waveguides

Akio Higo, Hiroshi Toshiyoshi, Hiroyuki Fujita, Yoshiaki Nakano

Research output: Contribution to conference › Paper › peer-review

Abstract

This paper presents design and theoretical analysis of a silicon optical waveguide modulator with an electrostatic micromechanical structure actuated in the evanescent range. We observed a 330-nm MEMS displacement and 7.4 kHz mechanical response on a 5-um-wide and 100-um-long bridge at a voltage of 60Vpp.

Original language	English
Pages	1465-1468
Number of pages	4
Publication status	Published - 2009 Dec 1
Event	16th International Display Workshops, IDW '09 - Miyazaki, Japan Duration: 2009 Dec 9 → 2009 Dec 11

Other

Other	16th International Display Workshops, IDW '09
Country/Territory	Japan
City	Miyazaki
Period	09/12/9 → 09/12/11

ASJC Scopus subject areas

Hardware and Architecture
Human-Computer Interaction
Electrical and Electronic Engineering
Electronic, Optical and Magnetic Materials

Cite this

@conference{9e3a4a729bd64dd4a89852f09ed7b077,

title = "MEMS integrated with silicon photonic wire waveguides",

abstract = "This paper presents design and theoretical analysis of a silicon optical waveguide modulator with an electrostatic micromechanical structure actuated in the evanescent range. We observed a 330-nm MEMS displacement and 7.4 kHz mechanical response on a 5-um-wide and 100-um-long bridge at a voltage of 60Vpp.",

author = "Akio Higo and Hiroshi Toshiyoshi and Hiroyuki Fujita and Yoshiaki Nakano",

year = "2009",

month = dec,

day = "1",

language = "English",

pages = "1465--1468",

note = "16th International Display Workshops, IDW '09 ; Conference date: 09-12-2009 Through 11-12-2009",

}

TY - CONF

T1 - MEMS integrated with silicon photonic wire waveguides

AU - Higo, Akio

AU - Toshiyoshi, Hiroshi

AU - Fujita, Hiroyuki

AU - Nakano, Yoshiaki

PY - 2009/12/1

Y1 - 2009/12/1

N2 - This paper presents design and theoretical analysis of a silicon optical waveguide modulator with an electrostatic micromechanical structure actuated in the evanescent range. We observed a 330-nm MEMS displacement and 7.4 kHz mechanical response on a 5-um-wide and 100-um-long bridge at a voltage of 60Vpp.

AB - This paper presents design and theoretical analysis of a silicon optical waveguide modulator with an electrostatic micromechanical structure actuated in the evanescent range. We observed a 330-nm MEMS displacement and 7.4 kHz mechanical response on a 5-um-wide and 100-um-long bridge at a voltage of 60Vpp.

UR - http://www.scopus.com/inward/record.url?scp=77954166541&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=77954166541&partnerID=8YFLogxK

M3 - Paper

AN - SCOPUS:77954166541

SP - 1465

EP - 1468

T2 - 16th International Display Workshops, IDW '09

Y2 - 9 December 2009 through 11 December 2009

ER -

MEMS integrated with silicon photonic wire waveguides

Abstract

Other

ASJC Scopus subject areas

Other files and links

Fingerprint

Cite this