MEMS integrated with silicon photonic wire waveguides

Akio Higo, Hiroshi Toshiyoshi, Hiroyuki Fujita, Yoshiaki Nakano

    Research output: Contribution to conferencePaperpeer-review


    This paper presents design and theoretical analysis of a silicon optical waveguide modulator with an electrostatic micromechanical structure actuated in the evanescent range. We observed a 330-nm MEMS displacement and 7.4 kHz mechanical response on a 5-um-wide and 100-um-long bridge at a voltage of 60Vpp.

    Original languageEnglish
    Number of pages4
    Publication statusPublished - 2009 Dec 1
    Event16th International Display Workshops, IDW '09 - Miyazaki, Japan
    Duration: 2009 Dec 92009 Dec 11


    Other16th International Display Workshops, IDW '09

    ASJC Scopus subject areas

    • Hardware and Architecture
    • Human-Computer Interaction
    • Electrical and Electronic Engineering
    • Electronic, Optical and Magnetic Materials

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