MEMS devices: Progress towards practical applications

Masayoshi Esashi

Research output: Contribution to journalReview articlepeer-review

Original languageEnglish
Pages (from-to)54-55
Number of pages2
JournalIEEJ Transactions on Electrical and Electronic Engineering
Volume4
Issue number1
DOIs
Publication statusPublished - 2009 Jan 1
Externally publishedYes

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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