MEMS-based novel X-ray optics for future astronomical missions

Ikuyuki Mitsuishi; Yuichiro Ezoe; Teppei Moriyama; Tomohiro Ogawa; Takuya Kakiuchi; Takaya Ohashi; Makoto Mita; Yoshitomo Maeda; Kazuhisa Mitsuda; Mitsuhiro Horade; Susumu Sugiyama; Raul Riveros; Hitomi Yamaguchi; Yoshiaki Kanamori; Kohei Morishita; Kazuo Nakajima; Ryutaro Maeda

doi:10.1109/OMEMS.2012.6318815

MEMS-based novel X-ray optics for future astronomical missions

Ikuyuki Mitsuishi, Yuichiro Ezoe, Teppei Moriyama, Tomohiro Ogawa, Takuya Kakiuchi, Takaya Ohashi, Makoto Mita, Yoshitomo Maeda, Kazuhisa Mitsuda, Mitsuhiro Horade, Susumu Sugiyama, Raul Riveros, Hitomi Yamaguchi, Yoshiaki Kanamori, Kohei Morishita, Kazuo Nakajima, Ryutaro Maeda

ENG - Robotics

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

We have been developing our original MEMS-based X-ray optics for future astronomical missions. To date, we verified the focusing of optical light and X-ray for the first time. The concept and recent advances are reviewed.

Original language	English
Title of host publication	2012 International Conference on Optical MEMS and Nanophotonics, OMN 2012
Pages	87-88
Number of pages	2
DOIs	https://doi.org/10.1109/OMEMS.2012.6318815
Publication status	Published - 2012
Event	2012 International Conference on Optical MEMS and Nanophotonics, OMN 2012 - Banff, AB, Canada Duration: 2012 Aug 6 → 2012 Aug 9

Publication series

Name	International Conference on Optical MEMS and Nanophotonics
ISSN (Print)	2160-5033
ISSN (Electronic)	2160-5041

Other

Other	2012 International Conference on Optical MEMS and Nanophotonics, OMN 2012
Country/Territory	Canada
City	Banff, AB
Period	12/8/6 → 12/8/9

Keywords

DRIE
X-ray optics
annealing

ASJC Scopus subject areas

Hardware and Architecture
Electrical and Electronic Engineering
Electronic, Optical and Magnetic Materials

Access to Document

10.1109/OMEMS.2012.6318815

Cite this

Mitsuishi, I., Ezoe, Y., Moriyama, T., Ogawa, T., Kakiuchi, T., Ohashi, T., Mita, M., Maeda, Y., Mitsuda, K., Horade, M., Sugiyama, S., Riveros, R., Yamaguchi, H., Kanamori, Y., Morishita, K., Nakajima, K., & Maeda, R. (2012). MEMS-based novel X-ray optics for future astronomical missions. In 2012 International Conference on Optical MEMS and Nanophotonics, OMN 2012 (pp. 87-88). [6318815] (International Conference on Optical MEMS and Nanophotonics). https://doi.org/10.1109/OMEMS.2012.6318815

MEMS-based novel X-ray optics for future astronomical missions. / Mitsuishi, Ikuyuki; Ezoe, Yuichiro; Moriyama, Teppei et al.

2012 International Conference on Optical MEMS and Nanophotonics, OMN 2012. 2012. p. 87-88 6318815 (International Conference on Optical MEMS and Nanophotonics).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Mitsuishi, I, Ezoe, Y, Moriyama, T, Ogawa, T, Kakiuchi, T, Ohashi, T, Mita, M, Maeda, Y, Mitsuda, K, Horade, M, Sugiyama, S, Riveros, R, Yamaguchi, H, Kanamori, Y, Morishita, K, Nakajima, K & Maeda, R 2012, MEMS-based novel X-ray optics for future astronomical missions. in 2012 International Conference on Optical MEMS and Nanophotonics, OMN 2012., 6318815, International Conference on Optical MEMS and Nanophotonics, pp. 87-88, 2012 International Conference on Optical MEMS and Nanophotonics, OMN 2012, Banff, AB, Canada, 12/8/6. https://doi.org/10.1109/OMEMS.2012.6318815

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title = "MEMS-based novel X-ray optics for future astronomical missions",

abstract = "We have been developing our original MEMS-based X-ray optics for future astronomical missions. To date, we verified the focusing of optical light and X-ray for the first time. The concept and recent advances are reviewed.",

keywords = "DRIE, X-ray optics, annealing",

author = "Ikuyuki Mitsuishi and Yuichiro Ezoe and Teppei Moriyama and Tomohiro Ogawa and Takuya Kakiuchi and Takaya Ohashi and Makoto Mita and Yoshitomo Maeda and Kazuhisa Mitsuda and Mitsuhiro Horade and Susumu Sugiyama and Raul Riveros and Hitomi Yamaguchi and Yoshiaki Kanamori and Kohei Morishita and Kazuo Nakajima and Ryutaro Maeda",

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doi = "10.1109/OMEMS.2012.6318815",

language = "English",

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T1 - MEMS-based novel X-ray optics for future astronomical missions

AU - Mitsuishi, Ikuyuki

AU - Ezoe, Yuichiro

AU - Moriyama, Teppei

AU - Ogawa, Tomohiro

AU - Kakiuchi, Takuya

AU - Ohashi, Takaya

AU - Mita, Makoto

AU - Maeda, Yoshitomo

AU - Mitsuda, Kazuhisa

AU - Horade, Mitsuhiro

AU - Sugiyama, Susumu

AU - Riveros, Raul

AU - Yamaguchi, Hitomi

AU - Kanamori, Yoshiaki

AU - Morishita, Kohei

AU - Nakajima, Kazuo

AU - Maeda, Ryutaro

PY - 2012

Y1 - 2012

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AB - We have been developing our original MEMS-based X-ray optics for future astronomical missions. To date, we verified the focusing of optical light and X-ray for the first time. The concept and recent advances are reviewed.

KW - DRIE

KW - X-ray optics

KW - annealing

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T3 - International Conference on Optical MEMS and Nanophotonics

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BT - 2012 International Conference on Optical MEMS and Nanophotonics, OMN 2012

T2 - 2012 International Conference on Optical MEMS and Nanophotonics, OMN 2012

Y2 - 6 August 2012 through 9 August 2012

ER -

MEMS-based novel X-ray optics for future astronomical missions

Abstract

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Keywords

ASJC Scopus subject areas

Access to Document

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