Mechanism of nitridation of silicon powder in a fluidized-bed reactor

Junichi Koike, Shoichi Kimura

Research output: Contribution to journalArticlepeer-review

15 Citations (Scopus)

Abstract

Direct nitridation of 400 μm average-sized silicon granules, composed of 2 um average-sized particles, was carried out in a fluidized-bed reactor. Nitridation progress was studied by transmission electron microscopy (TEM). TEM photomicrographs suggested that the formation of surface nitride layers on individual silicon particles and the subsequent spallation of these layers were the dominant process of the direct nitridation of silicon. The spallation was modeled based on a simple crack theory, and the critical thickness of nitride layers leading to spallation was estimated to be 57 nm. This agreed reasonably well with the experimentally observed values of 20-100 nm.

Original languageEnglish
Pages (from-to)365-370
Number of pages6
JournalJournal of the American Ceramic Society
Volume79
Issue number2
DOIs
Publication statusPublished - 1996 Jan 1

ASJC Scopus subject areas

  • Ceramics and Composites
  • Materials Chemistry

Fingerprint Dive into the research topics of 'Mechanism of nitridation of silicon powder in a fluidized-bed reactor'. Together they form a unique fingerprint.

Cite this